Industry Analysis
The ASML EUV blockade has triggered systemic technological regression in China’s semiconductor manufacturing. With EUV entirely off-limits and DUV access tightening, foundries like SMIC are resorting to multi-patterning DUV—a costly workaround that degrades yield and impedes co-optimization with advanced packaging like 3D stacking. Compliance risk now translates into fixed supply chain costs: even legacy tools face retroactive sanctions under U.S. Foreign Direct Product Rules. TSMC and Samsung are exploiting this gap to accelerate sub-2nm roadmaps, widening the performance chasm. Over the next 18 months, China’s chip sector will likely enter a negative feedback loop—aging equipment, stalled nodes, and design compromises—unless domestic lithography achieves reliable DUV production at 28nm, a threshold essential for meaningful high-end self-reliance.
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