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Research News - Liquid Metal Dealloying Creates Nanoporous Silicon Carbide at Just 800°C - Tohoku University

www.tohoku.ac.jp 2026-10-13 Tohoku University
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The 800°C threshold is not a 600-degree saving — it is a category shift. It moves nanoporous SiC fabrication from a materials-science problem into a process-engineering problem. Legacy routes demand >1400°C CVD or plasma etching, locking manufacturers into dedicated high-temperature furnaces and precluding co-linearity with already-processed wafers. At 800°C, the process slots into existing power-module back-end lines, sharing the thermal window with silver-sintering and AlN bonding. That is where the real cost collapse lives. Wolfspeed and Coherent built their moats on substrate crystal-growth capital intensity. Liquid-metal dealloying sidesteps that entirely, attacking the device-fabrication layer instead. For ROHM/SiCrystal this is a home-turf extension; for mainland China's TanKeBlue and SICC it is an IP-risk window demanding assessment within 18 months, because pilot-line validation would force architectural rethinking of SiC thermal-management packaging. Infineon and ST will likely run internal benchmarking within a year, but the more probable strategic counter is accelerating GaN-on-SiC hetero-integration to offset material-process disadvantage at the architecture level. Wolfspeed may pursue licensing to fold dealloying IP into its 8-inch narrative. The 24-month long tail: the real prize is not SiC. It is the proof-of-concept that low-temperature selective dissolution transfers to GaN, diamond, and other wide-bandgap materials. Once that methodology is codified, the cost curve for the entire wide-bandgap semiconductor stack shifts downward, and the capital-allocation logic built around high-temperature capacity becomes structurally obsolete.
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