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2026-06-24
DUV Lithography: EUV Lithography’s Best Kept Secret - EE Times
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news.google.com 2026-06-24 EE Times
2026-06-09
Chinese startup claims photonic chip production without DUV lithography, says nanoimprint process cuts costs by 90%
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tomshardware.com 2026-06-09 Etiido Uko
Chinese startup Prinano claims it produced 8-inch photonic chip wafers without DUV lithography, using nanoimprint technology that cuts costs by 90%.
Photonic chipsNanoimprint lithographyDUV lithographyEUV lithographySemiconductor manufacturingChinese semiconductorASML restrictionsLithography equipment