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Entegris and JSR Corporation/Inpria Corporation announced a non-exclusive cross-licensing agreement pertaining to extreme ultraviolet (EUV) lithography. The agreement involves the licensing of intellectual property related to EUV lithography technology. The cross-licensing agreement allows both companies to utilize each other’s patents in the field of EUV lithography. This arrangement is non-excl

BILLERICA, Mass. & TOKYO–(BUSINESS WIRE)–Entegris, Inc. (Nasdaq: ENTG), a global leader in advanced materials and purity solutions for the semiconductor industry, and JSR Corporation, a materials innovation leader and the parent company of Inpria Corporation, today announced entry into a non-exclusive cross-licensing agreement aimed at helping the semiconductor industry advance extreme ultraviolet