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ASML, the sole manufacturer of extreme ultraviolet (EUV) lithography systems, relies on complex laser-produced plasma (LPP) technology for its light source. While free-electron laser (FEL) technology—endorsed by Elon Musk—offers potential advantages such as higher power and reduced contamination, JP

This research focuses on critical contamination control technology development in semiconductor manufacturing. As semiconductor process nodes shrink from traditional micrometer-scale to nanometer-level, requirements for particle contamination control in manufacturing environments become increasingly

Physicists at the Universities of Konstanz and Stuttgart have demonstrated a novel 'liquid computer' using 400 microscopic particles in a liquid droplet, capable of chaotic signal forecasting and anomaly detection. Published in Communications AI & Computing, the system achieved an F1 score of 0.90 o