bits-chips.com
2026-06-24
Bits&Chips
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Beyond EUV: Blue-X explores sub-13.5nm lithography
24 June 2026
Paul van Gerven
Editor at Bits&Chips
Reading time: 4 minutes
An international consortium is exploring whether semiconductor lithography can eventually move to an even shorter wavelength.
For decades, semiconductor lithography has evolved according to a pattern: Engineers squeeze as much resolution as possible from a given